Air Products today announced it has broken ground on the first phase of its nitrogen trifluoride (NF3) plant in Ulsan, Korea. The new production facility, which will be operated by Air Products Korea Electronics, will produce more than 500 metric tons per year when completed in late 2007.

“The recent groundbreaking reinforces our commitment to our semiconductor and TFT-LCD customers around the globe that we will remain the world’s leading supplier of NF3,” said Corning Painter, vice president, Electronics at Air Products.

NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing devices, NF3 offers customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates. NF3 is also stable and nonflammable, making it a safe gas to transport, store and deliver to customers around the world.

Upon completion, Air Products global capacity will be more than 2,500 metric tons annually. The company has safely manufactured and distributed NF3 for more than 25 years from its manufacturing facility in Hometown, Pa. Air Products will continue to operate its three existing NF3 plants at that location to ensure a reliable global supply of NF3. www.airproducts.com

Keywords : Air Products, nitrogen trifluoride

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