Memsstar� launches full product range to MEMS and Nano markets 2006/02/22 水曜日 15:00:00 CST The ever-increasing demand for MEMS means a growing requirement among manufacturers for high-yield processing on reliable equipment. Memsstar� (MEMS Surface Treatment and Release) dry release replaces wet liquid processing methods for release and surface engineering for MEMS, enabling new processing capabilities which can be seamlessly transferred to volume production.  The Silicon Vapour Release (SVR) module etches silicon isotropically with excellent selectivity to other materials, enabling users to build MEMS structures from various mechanical layers and use silicon as the sacrificial layer.  Cost-effective and reliable SPD technology enables carefully controlled surface preparation and deposition of coatings and films materials and offers advantages such as superior film quality, coverage and conformality and tuneable film properties. Oxide Vapour Release (OVR) removes oxide sacrificial layers.   The modules are available in three configurations � Solo (manual load), Sentry (cassette load) and Multi (cassette load, multiple modules). www.memsstar.com